Enhancement the mechanical stability of silicon macro-samples containing a region of hierarchically organized pore structure
The results of a study of the mechanical resistance of single-crystal silicon macro-samples containing a region of porous silicon are presented. The design of macro-samples was developed, which provided the formation of a pore structure to a depth of up to 170 microns without cracking and destruction of the porous region. An increase in the crack resistance of porous silicon compared to monocrystalline silicon when indenting was found. The parameters of the pore structure are defined. The adsorption and desorption characteristics of the pore structure of samples were studied. The conclusion is made about the possibility of using macro-samples of the developed design, for example, as a carrier of medicines.
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Keywords
пористый кремний, механическая устойчивость, трещиностойкость, porous silicon, mechanical resistance, crack resistanceAuthors
| Name | Organization | |
| Krukovskii K.V. | Institute of Strength Physics and Materials Science of SB RAS | kvk@ispms.tsc.ru |
| Kashin O.A. | Institute of Strength Physics and Materials Science of SB RAS | okashin@ispms.tsc.ru |
| Romanov S.I. | Rzhanov Institute of Semiconductor Physics of SB RAS | Romanov@isp.nsc.ru |
| Bakina O.V. | Institute of Strength Physics and Materials Science of SB RAS | ovbakina@ispms.tsc.ru |
| Lotkov A.I. | Institute of Strength Physics and Materials Science of SB RAS | lotkov@ispms.tsc.ru |
| Luchin A.V. | Institute of Strength Physics and Materials Science of SB RAS | luchin250398@yandex.ru |
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