Morphology, structure and optical properties of SnO(x) films
The paper presents morphological, structural and optical properties of nanostructured SnO(x) films obtained by molecular beam epitaxy by tin deposition in an oxygen stream on an oxidized silicon substrate depending on the annealing temperature. The influence of the annealing temperature on the structural and phase state of the films was established. Orthorhombic phase SnO2 was observed after annealing in air at 500 °C. Increase in annealing to 800 °C leads to a small fraction of the tetragonal phase SnO2. A sharp change in the optical constants of the film near the annealing temperature of 500 °C. Observed wide absorption band in the range of 1.9-3.4 eV seems to be associated with a small (approximately 1%) number of non-oxidized metal clusters Sn. Nonmonotonic change of SnO(x) film thickness depending on annealing temperature was detected. A wide area of photoluminescence in the range of 450-850 nm with a maximum at ~ 600 nm is observed. Increasing the annealing temperature from 500 °C to 800 °C leads to an increase in intensity of almost 6 times.
Keywords
оксид олова,
эпитаксия,
наноструктуры,
рентгеновская дифракция,
коэффициент поглощения,
tin oxide,
epitaxy,
nanostructures,
x-ray diffraction,
absorption coefficientAuthors
| Nikiforov A.I. | Rzanov Institute of Semiconductor Pysica SB RAS; National Research Tomsk State University | nikif@isp.nsc.ru |
| Timofeev V.A. | Rzanov Institute of Semiconductor Pysica SB RAS | Vyacheslav.t@isp.nsc.ru |
| Mashanov V.I. | Rzanov Institute of Semiconductor Pysica SB RAS | mash@isp.nsc.ru |
| Azarov I.A. | Rzanov Institute of Semiconductor Pysica SB RAS; Novosibirsk State University | azarov_ivan@mail.ru |
| Loshkarev I.D. | Rzanov Institute of Semiconductor Pysica SB RAS | idl@isp.nsc.ru |
| Korolkov I.V. | Nikolaev Institute of Inorganic Chemistry SB RAS; Novosibirsk State University | korolkov@niic.nsc.ru |
| Gavrilova T.A. | Rzanov Institute of Semiconductor Pysica SB RAS | gavr@isp.nsc.ru |
| Esin M.Yu. | Rzanov Institute of Semiconductor Pysica SB RAS | yesinmisha@gmail.com |
Всего: 8
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