Influence of the percentage of argon in the Ar -N₂ gas mixture on the relative number of Ar⁺, N₂⁺, N and N⁺ particles in the plasma of a non-self-sustaining low-pressure glow discharge with a hollow cathode | Izvestiya vuzov. Fizika. 2022. № 11. DOI: 10.17223/00213411/65/11/70

Influence of the percentage of argon in the Ar -N₂ gas mixture on the relative number of Ar⁺, N₂⁺, N and N⁺ particles in the plasma of a non-self-sustaining low-pressure glow discharge with a hollow cathode

The paper presents the results of studies of argon-nitrogen plasma of a non-self-sustaining low-pressure glow discharge with a hollow cathode by optical emission spectrometry. The plasma was generated in a mixture of Ar-N₂ gases with an argon percentage from 0 to 100% at a total pressure of 1 Pa. The discharge current and voltage were maintained constant and amounted to 18 A and 165 V, respectively. A significant increase in the amount of Ar⁺ (up to 30%) at a nitrogen content of 10-25% was shown, which is associated with a shift in the reaction of nitrogen recharging with argon towards the generation of argon ions. It was found that at a low partial pressure of nitrogen (≈ 10%), a sharp increase in the content of atomic nitrogen is observed, which is probably due to the dissociation of nitrogen molecules upon collisions with an excited argon atom.

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Keywords

low-pressure glow discharge, hollow cathode, plasma diagnostics, optical emission spectrometry, nitrogen dissociation, atomic nitrogen, argon plasma

Authors

Name	Organization	E-mail
Kovalsky S.S.	Institute of High Current Electronics SB RAS	kovalsky@opee.hcei.tsc.ru
Denisov V.V.	Institute of High Current Electronics SB RAS	denisov@opee.hcei.tsc.ru
Ostroverkhov E.V.	Institute of High Current Electronics SB RAS	evgeniy86evgeniy@mail.ru
Prokop’ev V.E.	Institute of High Current Electronics SB RAS	prokop@ogl.hcei.tsc.ru

Всего: 4

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