Influence of the anode of the non-self-sustained glow discharge with hollow cathode on the spatial distribution of plasma density

The results of the study of the influence of the geometric dimensions, shape and location of the anode of a high-current non-self-sustained glow discharge with a hollow cathode at low (≈ 1 Pa) pressure with a current of up to 100 A on the degree of non-uniformity of the azimuthal plasma density distribution are presented. Measurements of the azimuthal distributions showed that with the injection of a stream of electrons with a current exceeding the value several times higher than the current of electrons formed as a result of secondary ion-electron emission processes, the average path length of electrons before leaving the anode L is much lower than for self-sustained mode of discharge. It was found that when an electron flux is injected into a glow discharge with a hollow cathode, the location of the anode significantly affects on the degree of non-uniformity of plasma density. The location of the annular anode in a place that does not allow direct visibility between the directions of injected electrons and the surface of the grid anode allows to achieve the minimum value of the inhomogeneity coefficient.

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