Space charge sheath near dielectric target, irradiated by electron beam
It is shown that the potential of an isolated metal or dielectric target irradiated by an electron beam in an average vacuum can be estimated by measuring the parameters of a beam plasma and the length of the space charge sheath between the target and the plasma boundary. In turn, under the same experimental conditions, this potential makes it possible to compare the secondary emission properties of target materials.
Download file
Counter downloads: 111
Keywords
плазменный электронный источник, диэлектрическая мишень, потенциал мишени, слой пространственного заряда, plasma electron source, dielectric target, target potential, space charge sheathAuthors
| Name | Organization | |
| Burdovitsin V.A. | Tomsk State University of Control Systems and Radioelectronics | burdov@fet.tusur.ru |
| Oks E.M. | Tomsk State University of Control Systems and Radioelectronics; Institute of High Current Electronics SB RAS | oks@fet.tusur.ru |
References
Sheehan J.P. and Hershkowitz N. // J. Vacuum Sci. Technol. - 2012. - V. A30. - P. 031302.
Бурдовицин В.А., Золотухин Д.Б., Окс Е.М. и др. // Доклады ТУСУРа. - 2017. - Т. 20. - № 3. - С. 65-70.
Chen H., Gong H., and Ong C.K. // J. Appl. Phys. - 1994. - V. 76. - No. 2. - P. 806-809.
Belhaj M., Jbara O., Odof S., et al. // Scanning. - 2000. - V. 22. - P. 352-356.
Бурдовицин В.А., Медовник А.В., Окс Е.М. и др. // ЖТФ. - 2012. - Т. 82. - Вып. 10. - С. 103-108.
Burdovitsin V.A. and Oks E.M. // Laser and Particle Beams. - 2008. - V. 26. - No. 04. - P. 619-635.
Burdovitsin V.A., Zolotukhin D.B., Oks E.M., et al. // J. Phys. D: Appl. Phys. - 2019. - V. 52. - P. 285204.
Lieberman M.A. // Handbook of Plasma Immersion Ion Implantation and Deposition / ed. A. Anders. - Willey and Sons, 2000. - Chapter 2.
Burdovitsin V.A., Oks E.M., and Zolotukhin D.B. // J. Phys. D: Appl. Phys. - 2018. - V. 51. - P. 304006.
