Evaporation of polycrystalline silica-aluminium cathode in cathodic arc vacuum discharge
The experimental work of the silicon evaporation with the steered cathodic vacuum arc discharge in a continuous mode was described in this paper. The current-voltage characteristic and the cathode spot velocities was obtained as the function of the external magnetic field induction. The silicon cathode erosion rate was obtained and its dependence on magnetic field was shown. The samples of the silicon coatings produced in continuous mode were obtained and the investigations of macroparticles sizes in thin films were carried out. The statistical data was obtained in a wide range of sizes 30 nm to 5 μm with the optical and atomic-force microscopes. The decrement of macroparticles flux density with increasing of magnetic field was shown. Also the mass fraction of droplets in the thin films was calculated and its reduction with magnetic field increment was shown.
Keywords
вакуумная дуга,
кремний,
капли,
скорость движения,
катодное пятно,
арочное поле,
эрозия,
покрытие,
cathodic arc,
vacuum arc,
silicon,
macroparticles,
spot velocity,
cathode spot,
steered arc,
erosion,
coatingAuthors
| Dukhopelnikov D.V. | Bauman Moscow State Technical University | duh@bmstu.ru |
| Kirillov D.V. | Bauman Moscow State Technical University | kirillovdv@bmstu.ru |
Всего: 2
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