Gas-discharge high-frequency generators for material processing

The article presents a novel method for obtaining high-frequency oscillations from high-voltage glow discharge. The method is based on the appearance of pressure fluctuations during the interaction of the injected gas stream with the stopper. The pressure fluctuations produce spatial heterogeneity of high-voltage glow discharge plasma concentration (14 kV, 30 mA), which results in discharge combustion instability. The difference between ignition voltage and discharge combustion allow for ionization processes and high-frequency oscillations which are selected by inductance-capacitance circuit at the frequency of 5 MHz. The part of voltage which is transformed into high-frequency oscillations reaches 40%. Testing the generator in the process of etching lithium niobate showed that the surface charge is removed from the substrate by the plasma, and by the bias and overcharge currents. The speed of etching was as much as 5 mm/h.

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