Secondary emission of atomic particles under bombardment of heavy d-metals by ions from nitrogen plasma

The results of kinetic modeling by the Monte Carlo method of sputtering heavy d -metals of the Ir, Os and W group by nitrogen ions N⁺ in the ion energy range of 0.5-2.5 keV are presented. The coefficients of physical ion sputtering, the average energy of sputtered atoms, the reflection coefficients of bombarding ions in the form of neutral nitrogen atoms, and the depth of penetration of ions into the target body were calculated. The calculations were performed for one-, two- and three-elements targets and the partial ion sputtering coefficients of these metals were determined and the influence of the surface binding energy on the ion sputtering parameters of individual target elements was studied. Calculations were performed for Al target to compare the ion sputtering parameters of heavy d -metals and light aluminum. Despite the strong difference in the surface binding energy for these metals, their sputtering coefficients are of the same order of magnitude due to the fact that nitrogen ions penetrate deeper into aluminum and the recoil atoms from the target are more difficult to exit. Reflected or backscattered neutralized nitrogen atoms represent the second type of atomic particles emitted from the target. The reflection coefficient of bombarding nitrogen particles from the heavy metals is about 35-38%, and from the light aluminum - only a few percent. It is recommended to use the obtained data in the design of plasma emission systems for depositing metal coatings.

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