Thermal stability of the structure and optical properties of nanostructured TiO2 films
The structure and optical properties of the titanium dioxide films during annealing from 100 to 400 °C were studied. The films were obtained by ion-plasma high-frequency magnetron sputtering of polycrystalline rutile target in an argon atmosphere. It was shown that as-prepared TiO2 films are nanostructured with ~8 nm of rutile crystallite and ~ 3.3 Å of interplanar distance and contain a small fraction of anatase. Optical band gap of the films is 3.01 eV, the refractive index under normal conditions is 2.25. The films annealing from 100 to 400 °C practically does not change their structure, optical band gap and refractive index under normal conditions, i.e. the obtained nanostructured TiO2 films are thermal stable.
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Keywords
titanium dioxide films, ion-plasma sputtering, annealing, structure, optical band gap, refractive indexAuthors
| Name | Organization | |
| Mikhailova S.L. | Al-Farabi Kazakh National University | svetik.mikhailova@gmail.com |
| Prikhodko O.Yu. | Al-Farabi Kazakh National University | oleg.prikhodko@kaznu.kz |
| Mukhametkarimov Ye.S. | Al-Farabi Kazakh National University | m.c.erzhan@mail.ru |
| Dauitkhan K. | Al-Farabi Kazakh National University | dkuansh@mail.ru |
| Doseke U.A. | Al-Farabi Kazakh National University | udoseke@mail.ru |
| Kozyukhin S.A. | Kurnakov Institute of General and Inorganic Chemistry Russian Academy of Sciences | sergkoz@igic.ras.ru |
| Kozik V.V. | National Research Tomsk State University | vkozik@mail.ru |
| Ismailova G.A. | Al-Farabi Kazakh National University | guzal_a81@mail.ru |
| Maksimova S.Ya. | Al-Farabi Kazakh National University | mak.son.21@mail.ru |
| Tarapeyeva A. Yu. | Al-Farabi Kazakh National University | tarapeyeva00@gmail.com |
| Zhakypov A.S. | Al-Farabi Kazakh National University | szhakypovalibek@gmail.com |
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