Current distribution over the hollow-cathode surface for low-pressure glow discharge
The results of investigation of low-pressure glow discharge with the hollow cathode for the conditions when the cathode cavity depth is comparable with cavity diameter are presented. Data on current distribution over the hollow-cathode surface using sectioned electrodes are obtained and the length of the cathode sheath is measured. It is shown that for the regime of suppressed glow discharge the main fraction of the total discharge current closes to the nearest to the anode cathode section. For the regime of ordinary glow discharge, when the cavity depth is equal to cavity diameter, discharge current over the cathode surface is distributed uniformly. The estimations of the discharge parameters and the values of the cathode sheath using the model of hollow-cathode discharge sustainment were done. Model agrees well with the experimental data.
Keywords
glow discharge,
hollow cathode dischargeAuthors
Landl N.V. | Institute of High Current Electronics SB RAS | landl@lnp.hcei.tsc.ru |
Korolev Y.D. | Institute of High Current Electronics SB RAS | korolev@lnp.hcei.tsc.ru |
Frants O.B. | Institute of High Current Electronics SB RAS | frants@lnp.hcei.tsc.ru |
Geyman V.G. | Institute of High Current Electronics SB RAS | geyman@lnp.hcei.tsc.ru |
Argunov G.A. | Institute of High Current Electronics SB RAS | argunov.grigory@yandex.ru |
Nekhoroshev V.O. | Institute of High Current Electronics SB RAS | credence@vtomske.ru |
Всего: 6
References
Korolev Y.D. and Koval N.N. // J. Phys. D: Appl. Phys. - 2018. - V. 51. - No. 32. - P. 323001.
Akishev Y.S., Karal’nik V.B., Petryakov A.V., et al. // Plasma Phys. Rep. - 2016. - V. 42. - No. 1. - P. 14.
Gavrilov N.V. and Kamenetskikh A.S. // Rev. Sci. Instrum. - 2004. - V. 75. - P. 1875.
Dewald E., Frank K., Hoffman D.H.H., et.al. // IEEE Trans. Plasma Sci. - 1997. - V. 25. - P. 272.
Bergmann K., Vieker J., and Wezyk A. // J. Appl. Phys. - 2016. - V. 120. - No. 14. - P. 143302.
Borisov V.M., Eltsov A.V., Ivanov A.S., et al.// J. Phys. D: Appl. Phys. - 2004. - V. 37. - P. 3254.
Иванов Ю.Ф., Лопатин И.В., Петрикова Е.А. и др. // Изв. вузов. Физика. - 2019. - T. 62. - № 11. - С. 137-142.
Lopatin I.V., Akhmadeev Y.H., and Koval N.N. // Rev. Sci. Instrum.- 2015. - V. 86. - Р. 103301.
Koval N.N., Ryabchikov A.I., Sivin D.O., et al. // Surf. Coat. Technol. - 2018. - V. 340. - P. 152.
Akhmadeev Y.H., Denisov V.V., Koval N.N., et al. // Plasma Phys. Rep. - 2017. - V. 43. - No. 1. - P. 67.
Девятков В.Н., Коваль Н.Н. // Изв. вузов. Физика. - 2017. - Т. 60. - № 9. - С. 44-48.
Lamba R.P., Pathania V., Meena B.L., et al. // Rev. Sci. Instrum. - 2015. - V. 86. - No. 10. - P. 103508.
Yan J.Q., Shen S.K., Wang Y.A., et al. // Rev. Sci. Instrum. - 2018. - V. 89. - No. 6. - P. 065102.
Korolev Y.D. and Frank K. // IEEE Trans. Plasma Sci. - 1999. - V. 27. - P. 1525.
Zhang J. and Liu X. // IEEE Trans. Dielectr. Electr. Insul. - 2017. - V. 24. - No. 4. - P. 2050-2055.
Korolev Y.D., Frants O.B., Landl N.V., et al. // IEEE Trans. Plasma Sci. - 2013. - V. 41. - No. 8. - P. 2087.
Korolev Y.D., Landl N.V., Geyman V.G., et al. // Plasma Phys. Rep. - 2016. - V. 42. - No. 8. - P. 799-807.
Ландль Н.В., Королев Ю.Д., Гейман В.Г. и др. // Изв. вузов. Физика. - 2017. - Т. 60. - № 8. - С. 5-12.
Королев Ю.Д., Ландль Н.В., Гейман В.Г. и др. // Изв. вузов. Физика. - 2019. - Т. 62. - № 7. - С. 162-171.
Kozyrev A.V., Korolev Y.D., Rabotkin V.G., and Shemyakin I.A. // J. Appl. Phys. - 1993. - V. 74. - No. 9. - P. 5366-5371.
Mehr T., Arentz H., Bickel P., et al. // IEEE Trans. Plasma Sci. - 1995. - V. 23. - P. 324-329.
Bochkov V.D., Dyagilev V.M., Ushich V.G., et al. // IEEE Trans. Plasma Sci. - 2001. - V. 29. - No. 5. - P. 802-808.
Korolev Y.D., Landl N.V., Geyman V.G., et al. // Plasma Phys. Rep. - 2018. - V. 44. - No. 1. - P. 110-117.
Ландль Н.В., Королев Ю.Д., Аргунов Г.А. и др. // Изв. вузов. Физика. - 2020. - Т. 63. - № 5. - С. 90-98.
Korolev Y.D., Landl N.V., Geyman V.G., et al. // IEEE Trans. Plasma Sci. - 2015. - V. 43. - No. 8. - P. 2349-2353.
Korolev Y.D., Landl N.V., Geyman V.G., et al. // Phys. Plasmas. - 2018. - V. 25. - No. 11. - P. 113510.
Korolev Y.D., Landl N.V., Geyman V.G., et al. // AIP Adv. - 2019. - V. 9. - No. 8. - P.085326.
Korolev Y.D., Landl N.V., Frants O.B., et al. // Phys. Plasmas. - 2020. - V. 27. - No. 7. - P. 073510.
Ландль Н.В., Королев Ю.Д., Гейман В.Г. и др. // Изв. вузов. Физика. - 2019. - Т. 62. - № 11. - С. 59-67.
Ландль Н.В., Королев Ю.Д., Гейман В.Г. и др. // Изв. вузов. Физика. - 2019. - Т. 62. - № 7. - С. 172-181.