Influence of discharge burning conditions on the distribution of parameters of a plasma generated in a non-self-sustaining glow discharge inside a hollow cathode
The parameters of the plasma of a non-self-sustaining glow discharge generated inside a metal hollow cathode 300 mm long and 25 mm in inner diameter are investigated. A feature of this system is the additional injection of electrons from the auxiliary discharge plasma, formed by a plasma source with a combined heated and hollow cathode «PINK». The dependences and combustion modes of a non-self-sustaining glow discharge are presented and described at a pressure in the range (0.06 ÷ 1.4) Pa and a combustion voltage (70 ÷ 300) V. Studies of plasma parameters using double Langmuir probes have shown that this discharge system provides generation nitrogen plasma inside the hollow cathode with inhomogeneity from ± 12 to ± 63%.
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Keywords
glow discharge, hollow cathode, hot and hollow cathode arc discharge, low pressure discharge, double probe, plasma parametersAuthors
| Name | Organization | |
| Ignatov D.Yu. | Institute of High Current Electronics SB RAS | danilabay29@ya.ru |
| Kovalsky S.S. | Institute of High Current Electronics SB RAS | kovalskiy_ss@bptvac.ru |
| Denisov V.V. | Institute of High Current Electronics SB RAS | denisov@opee.hcei.tsc.ru |
| Lopatin I.V. | Institute of High Current Electronics SB RAS | lopatin@opee.hcei.tsc.ru |
| Koval N.N. | Institute of High Current Electronics SB RAS | koval@hcei.tsc.ru |
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