Physical features of the functioning of a planar magnetron sputter with a thermaly insulated and heated in discharge target for boron coatings | Izvestiya vuzov. Fizika. 2021. № 12. DOI: 10.17223/00213411/64/12/3

Physical features of the functioning of a planar magnetron sputter with a thermaly insulated and heated in discharge target for boron coatings

The design, the principle of operation, and the characteristics of a planar magnetron sputter for pure boron coatings are presented. A feature of this device is the use of a thermally insulated target (cathode) made from pure crystalline boron, which was heated to provide electrical conductivity sufficient for the stable functioning of the magnetron discharge, by an auxiliary low-current discharge. This makes it possible to realize in the magnetron a DC mode as well as a pulsed self-sputtering mode, in which boron ions in the discharge plasma dominate over the ions of the working gas. Another feature of the magnetron was the use of a slotted anode of a special design, which ensures stable and long-term operation of the device when a non-conductive boron film is applied to the anode surface. When using a pulsed discharge with a peak current of 40 A, a pulse duration of 400 μs, and pulse repetition rate of 25 p.p.s., the deposition rate of pure boron coatings on a substrate installed at a distance of 10 cm from the cathode was comparable to the deposition rate of coatings in a DC magnetron discharge with a current of 300 mA and was about 20-30 nm/min.

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Keywords

boron films, plasma, planar magnetron, heated boron target

Authors

Name	Organization	E-mail
Vizir A.V.	Institute of High Current Electronics SB RAS	vizir@opee.hcei.tsc.ru
Nikolaev A.G.	Institute of High Current Electronics SB RAS	nik@opee.hcei.tsc.ru
Oks E.M.	Institute of High Current Electronics SB RAS; 2Tomsk State University of Control Systems and Radioelectronics	oks@fet.tusur.ru
Frolova V.P.	Institute of High Current Electronics SB RAS; 2Tomsk State University of Control Systems and Radioelectronics	frolova_valeriya_90@mail.ru
Cherkasov A.A.	Institute of High Current Electronics SB RAS	alekscherkasov96@gmail.com
Shandrikov M.V.	Institute of High Current Electronics SB RAS	shandrikov@opee.hcei.tsc.ru
Yushkov G.Y.	Institute of High Current Electronics SB RAS	gushkov@mail.ru

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