Influence of deposition conditions on the properties of multi-layer coatings based on Zr, Ti, Al and Si nitrides synthesized by plasma-assisted cathode-arc spraying
The regularities of the formation of multilayer coatings based on the ZrTiN and ZrTiAlSiN systems were studied. The maximum values of hardness of the obtained coatings are 28 and 29 GPa, respectively. An increase in the rotation speed from 1 to 3 rpm leading to a decrease in the thickness of nanolayers in the coatings of the ZrTiN and ZrTiAlSiN systems, leads to a decrease in the value of the hardness of the coatings by 30 and 50%, respectively. The addition of Al and Si to the coating leads to nanostructuring of multicomponent ZrTiAlSiN coatings and to increase in its oxidation resistance.
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Keywords
multilayer coating, zirconium nitride, titanium nitride, plasma assistance, cathodic arc deposition, nanostructuringAuthors
| Name | Organization | |
| Savostikov V.M. | Institute of High Current Electronics SB RAS | svm.53@mail.ru |
| Denisova Yu.A. | Institute of High Current Electronics SB RAS | yukolubaeva@mail.ru |
| Denisov V.V. | Institute of High Current Electronics SB RAS | volodyadenisov@yandex.ru |
| Leonov A.A. | Institute of High Current Electronics SB RAS | laa-91@yandex.ru |
| Ovchinnikov S.V. | Institute of High Current Electronics SB RAS | ovmlmpin@ispms.tsc.ru |
| Savchuk M.V. | Institute of High Current Electronics SB RAS | mixail96@bk.ru |
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