Generation of homogeneous gas-discharge beam-plasma formations in an extended hollow cathode of high current glow discharge

The regularities of the generation of gas-discharge beam-plasma formations formed in a high-current non-self-sustained glow discharge at low (≈ 1 Pa) pressure in an extended, 1.2 m long, hollow cathode with a volume of 0.34 m³ with a length-to-diameter ratio of 2: 1 were investigated. It is shown that in a system with one electron source providing injection of electrons into the hollow cathode of a glow discharge, a sharp nonuniformity (≈ 40%) of the nitrogen plasma concentration distribution is observed. In an extended hollow cathode, the problem of inhomogeneity of the plasma concentration distribution is solved by using two sources of electrons that provides injection of electrons from the auxiliary arc plasma into the hollow cathode of the glow discharge. The use of two sources of electrons makes it possible to form beam-plasma formations with an inhomogeneity of no more than 18%. A source of beam-plasma formations based on a non-self-sustained glow discharge with an extended hollow cathode was used for ion-plasma treatment of Cr12MoV die steel products.

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