Influence of voltage polarity on electric strength of thin film capacitors

This article reveals the peculiarities of the influence of the change in the polarity of the voltage applied to the plates of thin-film capacitors on the change in the electric breakdown voltage. The reason for the decrease in the voltage of the first breakdown of a thin-film capacitor is established when the polarity of the applied voltage is reversed. This decrease is due to a strong increase in the electric field strength in the bulk of the dielectric due to the accumulation of a negative space charge on the microtips of the electrodes when the electrode was at a negative potential. This effect is observed in capacitor structures Al-SiO₂-Al and Al-TiO₂-Al, which allow us to assume its versatility and extends to the entire spectrum of dielectric films used in microelectronics.

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