Methods for plasma density estimations in large-volume hollow anode
The results of investigation of low-pressure glow discharge with the hollow cathode and large-volume hollow anode in argon and nitrogen are presented. Data on plasma density and electron temperature are obtained. Model, which describes the mechanisms of plasma sustaining in hollow anode, is proposed. Model takes into account non-uniformity of plasma density distribution in the anode cavity. The estimations of the plasma parameters were done. Model agrees well with the experimental data.
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Keywords
glow discharge, hollow cathode discharge, hollow anode dischargeAuthors
| Name | Organization | |
| Landl N.V. | Institute of High Current Electronics SB RAS | landl@lnp.hcei.tsc.ru |
| Korolev Y.D. | Institute of High Current Electronics SB RAS | korolev@lnp.hcei.tsc.ru |
| Kozyrev A.V. | Institute of High Current Electronics SB RAS | kozyrev@to.hcei.tsc.ru |
| Lopatin I.V. | Institute of High Current Electronics SB RAS | lopatin@opee.hcei.tsc.ru |
References
Korolev Y.D., Koval N.N. //j. Phys. D: Appl. Phys. - 2018. - V. 51. - No. 32. - P. 323001.
Akishev Y.S., Karal’nik V.B., Petryakov A.V., et al. // Plasma Phys. Rep. - 2016. - V. 42. - No. 1. - P. 14.
Gavrilov N.V., Kamenetskikh A.S. // Rev. Sci. Instrum. - 2004. - V. 75. - P. 1875.
Dewald E., Frank K., Hoffman D.H.H., et al. // IEEE Trans. Plasma Sci. - 1997. - V. 25. - P. 272.
Yushkov G.Y. // Rev. Sci. Instrum. - 2004. - V. 75. - P. 1582.
Oks E.M., Vizir A.V., Yushkov G.Y. // Rev. Sci. Instrum. - 1998. - V. 69. - P. 853.
Bergmann K., Vieker J., Wezyk A. //j. Appl. Phys. - 2016. - V. 120. - No. 14. - P. 143302.
Borisov V.M., Eltsov A.V., Ivanov A.S., et al. //j. Phys. D: Appl. Phys. - 2004. - V. 37. - P. 3254.
Rosier O., Apetz R., Bergmann K., et al. // IEEE Trans. Plasma Sci. - 2004. - V. 32. - P. 240.
Lamba R.P., Pathania V., Meena B.L., et al. // Rev. Sci. Instrum. - 2015. - V. 86. - No. 10. - P. 103508.
Yan J.Q., Shen S.K., Wang Y.A., et al. // Rev. Sci. Instrum. - 2018. - V. 89. - No. 6. - P. 065102.
Zhang J., Liu X. // IEEE Trans. Dielectr. Electr. Insul. - 2017. - V. 24. - No. 4. - P. 2050-2055.
Frank K., Christiansen J. // IEEE Trans. Plasma Sci. - 1989. - V. 17. - No. 5. - P. 748.
Frank K., Boggasch E., Christiansen J., et al. // IEEE Trans. Plasma Sci. - 1988. - V. 16. - No. 2. - P. 317.
Mehr T., Arentz H., Bickel P., et al. // IEEE Trans. Plasma Sci. - 1995. - V. 23. - No. 3. - P. 324.
Frank K., Dewald E., Bickes C., et al. // IEEE Trans. Plasma Sci. - 1999. - V. 27. - No. 4. - P. 1008.
Ландль Н.В., Королев Ю.Д., Гейман В.Г., Франц О.Б. // Изв. вузов. Физика. - 2017. - Т. 60. - № 8. - С. 13-20.
Ландль Н.В., Королев Ю.Д., Гейман В.Г. и др. // Изв. вузов. Физика. - 2017. - Т. 60. - № 8. - С. 5-12.
Kondrat’eva N.P., Koval N.N., Korolev Y.D., Schanin P.M. //j. Phys. D: Appl. Phys. - 1999. - V. 32. - P. 699.
Иванов Ю.Ф., Лопатин И.В., Петрикова Е.А. и др. // Изв. вузов. Физика. - 2019. - Т. 62. - № 11. - С. 137-142.
Lopatin I.V., Akhmadeev Y.H., Koval N.N. // Rev. Sci. Instrum. - 2015. - V. 86. - 103301.
Koval N.N., Ivanov Y.F., Lopatin I.V., et al. // Russ. J. Gen. Chem. - 2015. - V. 85. - P. 1326.
Koval N.N., Ryabchikov A.I., Sivin D.O., et al. // Surf. Coat. Technol. - 2018. - V. 340. - P. 152.
Akhmadeev Y.H., Denisov V.V., Koval N.N., et al. // Plasma Phys. Rep. - 2017. - V. 43. - No. 1. - P. 67.
Девятков В.Н., Коваль Н.Н. // Изв. вузов. Физика. - 2017. - Т. 60. - № 9. - С. 44-48.
Krysina O.V., Koval N.N., Lopatin I.V., et al. //j. Phys.: Conf. Ser. - 2016. - V. 669. - 012032.
Grishkov A.A., Korolev Y.D., Shklyaev V.A. // Phys. Plasmas. - 2020. - V. 27. - No. 10. - 103504.
Ландль Н.В., Королев Ю.Д., Гейман В.Г. и др. // Изв. вузов. Физика. - 2019. - Т. 62. - С. 59-67.
Korolev Y.D., Landl N.V., Geyman V.G., et al. // Plasma Phys. Rep. - 2016. - V. 42. - No. 8. - P. 799-807.
Ландль Н.В., Королев Ю.Д., Лопатин И.В. и др. // Изв. вузов. Физика. - 2020. - Т. 63. - № 10. - С. 117-123.
Metel A.S., Grigoriev S.N., Melnik Y.A., Panin V.V. // Plasma Phys. Rep. - 2009. - V. 35. - No. 12. - P. 1058-1067.
Raizer Y.P. Gas Discharge Physics. - Berlin; Heidelberg: Springer, 1991.
