Influence of atoms of the (001) Au face on the ion sputtering yield: comparison with Sigmund theory

The influence of atoms on the (001) Au surface on the sputtering yield is investigated. It is shown that the greater the number of surrounding atoms around the ejected atom, the higher the sputtering yield compared to the prediction of the Sigmund classical sputtering theory. The increase in the sputtering probability and the sputtering yield by ~ 40% is associated with the number of scattering centers, at which the scattering of the ejected atom occurs with a deviation toward the surface normal. As a result, the number of sputtered ejected atoms that have overcome the planar potential barrier increases. The results show that the effect of above-surface scattering makes a significant contribution to sputtering.

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