Influence of the process of formation of anorthite inclusions on the phase composition, structure, and physical properties of corundum ceramics | Izvestiya vuzov. Fizika. 2025. № 11. DOI: 10.17223/00213411/68/11/14

Influence of the process of formation of anorthite inclusions on the phase composition, structure, and physical properties of corundum ceramics

The aim of this study is to investigate the formation of anorthite inclusions in dark and white corundum ceramics used in metal-ceramic integrated circuit housings. Possible causes of anorthite formation in the ceramic structure and the role of zircon are discussed. The following solutions were proposed: eliminating zircon concentrate from the batch, introducing magnesium carbonate (MgCO3), and adjusting the CaCO3 content. Analysis of the microstructure, phase composition, and physical properties confirmed a decrease in porosity, the disappearance of anorthite, and an increase in density. The results demonstrate the potential of modified ceramics for microelectronics.

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Keywords

anorthite, aluminum oxide, dielectric ceramics, porosity, grain size

Authors

Name	Organization	E-mail
Grigoriev Mikhail V.	Tomsk State University	mvgrigoriev@yandex.ru
Egoshin Valerii A.	Tomsk State University; «Factory of Semiconductor Devices» Joint-Stock Company	vaegoshin@zpp12.ru
Akhmadieva Anastasia A.	Tomsk State University	nas99.9@yandex.ru
Savchenko Nikolai L.	Tomsk State University	savnick@ispms.ru
Ermolaev Evgenii V.	«Factory of Semiconductor Devices» Joint-Stock Company	ermolaev_ev@zpp12.ru
Akhmetgaliev Ravil S.	Tomsk State University; «Factory of Semiconductor Devices» Joint-Stock Company	rshahmetgaliev@zpp12.ru
Shugaepov Shamil N.	Tomsk State University; «Factory of Semiconductor Devices» Joint-Stock Company	shnshugaepov@zpp12.ru
Zhukov Ilya A.	Tomsk State University	gofra930@gmail.com

Всего: 8

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