Titanium dioxide coatings obtained by vacuum-arc method in plasma assisted modes: synthesis, structure, properties | Izvestiya vuzov. Fizika. 2025. № 12. DOI: 10.17223/00213411/68/12/16

Titanium dioxide coatings obtained by vacuum-arc method in plasma assisted modes: synthesis, structure, properties

Titanium dioxide coatings have been formed by vacuum-arc plasma-assisted method and their structure, phase composition and properties have been studied in detail. It is shown that the discharge current of the gas plasma source is one of the key parameters allowing to control the polymorphic composition of titanium dioxide coating, its hardness and wear resistance. Titanium dioxide in coatings is present in two polymorphic modifications: rutile and anatase, the relative content of which depends on the conditions of plasma assist. Titanium dioxide coatings, irrespective of the plasma assisted mode, are nanocrystalline material having a columnar structure.

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Keywords

titanium dioxide, vacuum-arc plasma-assisted method, deposition, phase composition, structure, micro-hardness, wear resistance

Authors

Name	Organization	E-mail
Prokopenko Nikita A.	Institute of High Current Electronics of the Siberian Branch of the Russian Academy of Sciences	nick08_phantom@mail.ru
Petrikova Elizaveta A.	Institute of High Current Electronics of the Siberian Branch of the Russian Academy of Sciences	elizmarkova@yahoo.com
Tolkachev Oleg S.	Institute of High Current Electronics of the Siberian Branch of the Russian Academy of Sciences	ole.ts@mail.ru
Krysina Olga V.	Institute of High Current Electronics of the Siberian Branch of the Russian Academy of Sciences	ov.krysina@hcei.ru
Koval Nikolay N.	Institute of High Current Electronics of the Siberian Branch of the Russian Academy of Sciences	nn.koval@hcei.ru
Ivanov Yuriy F.	Institute of High Current Electronics of the Siberian Branch of the Russian Academy of Sciences	yufi55@mail.ru

Всего: 6

References

Etacheri V., Di Valentin C., Schneider J., et al. // J. Photochem. Photobiol. C: Photochem. Rev. - 2015. - V. 25. - P. 1-29. - https://doi.org/10.1016/j.jphotochemrev.2015.08.003.

Titanium Dioxide: Advances and Applications / ed. Hafiz Muhammad Ali. - IntechOpen, 2022. - DOI: 10.5772/intechopen.94670.

Kandiel T.A., Robben L., Alkaima A., Bahnemann D. // Photochem. Photobiol. Sci. - 2013. - V. 12. - No. 4. - P. 602-609. - DOI: 10.1039/c2pp25217a.

Wu Q., Li D., Hou Y., et al.// Mater. Chem. Phys. - 2007. - V. 102. - No. 1. - P. 53-59. - DOI: 10.1016/j.matchemphys.2006.11.008.

Интернет-ресурс: https://catalogmineralov.ru/mineral/rutile.html.

Ведринский Р.В., Крайзман В.Л., Новакович А.А. и др. // Исследовано в России. - 2004. - С. 1353-1364. - URL: http://zhurnal.ape.relarn.ru/articles/2004/128.pdf.

Ремпель А.А., Валеева А.А. // Известия Академии наук. Сер. химич. - 2019. - № 12. - С. 2163-2171.

Ambartsumov M.G., Ambartsumov M., Chapura O., et al. // Appl. Surf. Sci. - 2024. - V. 672. - P. 160822. - DOI: 10.1016/j.apsusc.2024.160822.

Jafari S., Mahyad B., Hashemzadeh H., et al. // Int. J. Nanomed. - 2020. - V. 15. - P. 3447-3470. - DOI: 10.2147/ijn.s249441.

Fujishima A., Hashimoto K., Watanabe T. TiO2 Photocatalysis: Fundamentals and Applications. - Tokyo: BKC, 1999. - 176 p.

Xu M., Huang N., Xiao Z., Lu Z. // Supramolecular Sci. - 1998. - V. 5. - No. 5-6. - P. 449-451. - DOI: 10.1016/s0968-5677(98)00048-0.

Akira F., Rao T., Tryk D. // J. Photochem. Photobiol. A: Chemistry. - 2000. - V. 1. - P. 1-21. - DOI: 10.1016/S1389-5567(00)00002-2.

Zhang A., Sun Y. // World J. Gastroenterology. - 2004. - V. 10 - No. 21. - P. 3191-3193. - DOI: 10.3748/wjg.v10.i21.3191.

Shugurov V.V., Koval N.N., Krysina O.V., Prokopenko N.A. // J. Phys.: Conf. Ser. - 2019. - V. 1393. - No. 1. - P. 012131. - DOI: 10.1088/1742-6596/1393/1/012131.

Винтизенко Л.Г., Григорьев С.В., Коваль Н.Н. и др. // Изв. вузов. Физика. - 2001. - Т. 44. - № 9. - C. 28-35.

Prokopenko N.A., Petrikova E.A., Shugurov V.V., et al. // IOP Conf. Ser.: Mater. Sci. Eng. - 2021. - V. 1093. - P. 012025. - DOI:10.1088/1757-899X/1093/1/012025.

Devyatkov V., Ivanov Yu., Krysina O., et al. //. Vacuum - 2017. - V. 143. - P. 464. - DOI: 10.1016/J.VACUUM.2017.04.016.

Ivanov Yu.F., Krysina O.V., Petrikova E.A., et al. // High Temperature Mater. Proc. - 2017. - V. 21(1). - P. 53. - DOI:10.1615/HIGHTEMPMATPROC.2017021265.

ГОСТ 19807-91. Титан и сплавы титановые деформируемые.

ГОСТ 3882-74. Сплавы твердые спеченные. Марки.

Бетехтин А.Г. Курс минералогии / под науч. ред. Б.И. Пирогова и Б.Б. Шкурского. - М.: КДУ, 2007. - 720 с.